Modeling / Computational Lithography

김영창 (Young Chang Kim), Mentor Graphgics, USA

Physical and Empirical Models for Patterning Failure 

Apoorva Oak, imec, Belguim

Review – Machine learning in computational lithography across industry, academia and imec

김영석(Young-Seok Kim), AMSL

OPC Model accuracy study using high volume contour-based gauges and deep learning

on memory device

Alternative Lithography / Printed electronics

손정곤 (Jeong Gon Son), 한국과학기술연구원  (KIST)

Surface/interface control for perpendicular orientation of directed self-assembly

전환진 (Hwan-Jin Jeon), 한국산업기술대학교 (Korea Polytechnic University)

Secondary sputtering lithography

김현준 (Hyun Jun Kim), 삼성종합기술원 (SAIT)

Fabrication of transparent fingerprint sensor using rolling mask lithography

장재원 (Jae-Won Jang), 부경대학교 (Pukyong National University)

Diffraction gratings generated by top-down and bottom-up approaches based on scanning probe lithography

향후 일정을 곧 공지하도록 하겠습니다. 

Patterning Material

조맹효 (Maenghyo Cho), 서울대학교 (Seoul National University)

Multiscale Analysis and Design on Sub-10 nm EUV Photoresist Patterning

김명웅 (Myungwoong Kim), 인하대학교 (Inha University)

Single Component Photoimageable Polymeric Systems to Create Functionalizable Surfaces

김승현 (Seung Hyun Kim), 인하대학교 (Inha University)

3D-nanostructured polymeric films via block copolymer self-assembly and solvent orthogonality 

심재환 (Jea-Hwan Sim), Dupont E&I

Progress in Underlayer Materials for Challenges of Advanced Patterning Process

Extreme UV & Optical Lithography

이성우 (Sung-Woo Lee ), ASML

Progress on 0.33 NA EUV Systems for High-Volume Manufacturing

이동근 (Donggun Lee), ESOL

Actinic EUV mask 검사장비 

Mr. Mamoru Tamura, Nissan

EUV underlayer development and challenges

홍주희 (JU HEE HONG), SNS Tech

EUV 용 Pellicle 제작

Metrology / Inspection

강윤식 (Yoonshik Kang), SK 하이닉스 (SK hynix)

반도체 산업에서의 기계 학습 활용에 의한 미세 패턴 계측

유우식 (Woo Sik Yoo ), WaferMasters, USA

Hyperspectral Photoluminescence Characterization of Silicon Wafers for CMOS Image Sensors

장기수 (Ki Soo Chang), 한국기초과학지원연구원 (Korea Basic Science Institute)

레이저 스캐닝 공초점 열반사 현미경 및 응용 연구

진종한 (Jonghan Jin), 한국표준과학연구원 (KRISS)

미세 패턴의 삼차원 정밀 형상 측정

조상준 (Sang-Joon Cho), Park Systems

Quantitative Automated AFM Technologies for Industrial Applications

김영식 (Young-Sik Ghim), 한국표준과학연구원 (KRISS)

다층막 내부구조 분석을 위한 3차원 토모그라피 측정기술

(Special Session) Nano fabrication for next generation optical devices

김선경 (Sun Kyung Kim), 경희대학교 (Kyung Hee University)

A scalable, facile fabrication for achieving high-index-contrast periodic patterns

장민석 (Min Seok Jang), 한국과학기술원 (KAIST)

Nanopatterened graphene for active modulation of mid-infrared light

이승우 (Seungwoo Lee), 고려대학교 (Korea University)

Soft self-assembly for nano-optics

이한석  (Hansuek Lee), 한국과학기술원 (KAIST)

Microfabrication technique for on-chip ultra-high-Q resonators having sub-nanometer surface roughness

옥종걸 (Jong G. Ok), 서울과기대학교 (Seoul National University of Science and Technology)

Piezo-actuated uniaxial indentation-driven period-tunable nanopatterning for user-specific design and scalable fabrication of flexible photonic devices

김명기 (Myung-ki Kim), 고려대학교 (Korea University)

3-D nanofabrication for extreme photon squeezing

X-ray Source 및 계측 응용 기술

차보경 (Bo Kyung Cha), 한국전기연구원 (KERI)

Next-generation digital X-ray imaging sensor and medical imaging system

송윤호 (Yoon-Ho Song), 전자통신연구원 (ETRI)

Nano-focus digital x-ray sources based on carbon nanotube field electron emitters

for semiconductor inspections

강경태 (Kyung-Tae Kang), 생산기술연구원 (KITECH)

Oxide thin film transistor for x-ray image sensor application

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